Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device

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dc.creatorGrasser, L.
dc.creatorMathias, H.
dc.creatorParrain, F.
dc.creatorRoux, X. Le
dc.creatorGilles, J. -P.
dc.date2008-02-21
dc.date.accessioned2026-07-07T09:22:24Z
dc.date.available2026-07-07T09:22:24Z
dc.descriptionParametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
dc.identifierhttps://arxiv.org/abs/0802.3073
dc.identifierhttp://arxiv.org/abs/0802.3073
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/155361
dc.subjectOther Computer Science
dc.titleMems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device
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