Architecture for Integrated Mems Resonators Quality Factor Measurement

Thumbnail Image

Date

Authors

Journal Title

Journal ISSN

Volume Title

Publisher

Abstract

Description

In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for sufficiently high quality factor values (Q > 100).
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)

Keywords

Other Computer Science

Citation

URI

http://salesiana.dossiersoluciones.com/handle/123456789/155681

Consulte el texto completo en el siguiente enlace:

https://arxiv.org/abs/0802.3767
 http://arxiv.org/abs/0802.3767
 Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)

Collections

arXiv