Architecture for Integrated Mems Resonators Quality Factor Measurement

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dc.creatorMathias, H.
dc.creatorParrain, F.
dc.creatorGilles, J. -P.
dc.creatorMegherbi, S.
dc.creatorZhang, M.
dc.creatorCoste, Ph.
dc.creatorDupret, A.
dc.date2008-02-26
dc.date.accessioned2026-07-07T09:23:17Z
dc.date.available2026-07-07T09:23:17Z
dc.descriptionIn this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for sufficiently high quality factor values (Q > 100).
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
dc.identifierhttps://arxiv.org/abs/0802.3767
dc.identifierhttp://arxiv.org/abs/0802.3767
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/155681
dc.subjectOther Computer Science
dc.titleArchitecture for Integrated Mems Resonators Quality Factor Measurement
dc.typetext

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