Nanolithography and manipulation of graphene using an atomic force microscope

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We use an atomic force microscope (AFM) to manipulate graphene films on a nanoscopic length scale. By means of local anodic oxidation with an AFM we are able to structure isolating trenches into single-layer and few-layer graphene flakes, opening the possibility of tabletop graphene based device fabrication. Trench sizes of less than 30 nm in width are attainable with this technique. Besides oxidation we also show the influence of mechanical peeling and scratching with an AFM of few layer graphene sheets placed on different substrates.
11 pages text, 5 figures

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Mesoscale and Nanoscale Physics

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http://salesiana.dossiersoluciones.com/handle/123456789/166295

Consulte el texto completo en el siguiente enlace:

https://arxiv.org/abs/0806.0716
 http://arxiv.org/abs/0806.0716
 Solid State Communications 147. 366-369 (2008)
 doi:10.1016/j.ssc.2008.06.027

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arXiv