Integrated 3D Sound Intensity Sensor with Four-Wire Particle Velocity Sensors

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A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded "back chamber" at both sides of the chip.
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)

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http://salesiana.dossiersoluciones.com/handle/123456789/212506

Consulte el texto completo en el siguiente enlace:

https://arxiv.org/abs/0805.0906
 http://arxiv.org/abs/0805.0906
 Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)

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arXiv