Integrated 3D Sound Intensity Sensor with Four-Wire Particle Velocity Sensors

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dc.creatorYntema, Doekle
dc.creatorVan Honschoten, Joost
dc.creatorWiegerink, Remco
dc.date2008-05-07
dc.date.accessioned2026-07-07T12:18:43Z
dc.date.available2026-07-07T12:18:43Z
dc.descriptionA new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded "back chamber" at both sides of the chip.
dc.descriptionSubmitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
dc.identifierhttps://arxiv.org/abs/0805.0906
dc.identifierhttp://arxiv.org/abs/0805.0906
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/212506
dc.subjectOther Computer Science
dc.titleIntegrated 3D Sound Intensity Sensor with Four-Wire Particle Velocity Sensors
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