Above Ic Micro-Power Generators for RF-Mems

Oukassi, S.; Salot, R.; Bancel, S.; Pereira-Ramos, J. -P.

Above Ic Micro-Power Generators for RF-Mems

Authors

Oukassi, S.

Salot, R.

Bancel, S.

Pereira-Ramos, J. -P.

Description

This work presents recent advances in the development and the integration of an electrochemical (chemicalelectrical energy conversion) micro power generator used as a high voltage energy source for RF-MEMS powering. Autonomous MEMS require similarly miniaturized power sources. Up to day, solid state thin film batteries are realized with mechanical masks. This method doesn't allow dimensions below a few mm^2 active area, and besides the whole process flow is done under controlled atmosphere so as to ensure materials chemical stability (mainly lithiated materials). Within this context, Microelectronics micro-fabrication procedures (photolithography, Reactive Ion Etching...) are used to reach both miniaturisation (100x100 $μ$m^2 targeted unit cell active area) and Above IC technological compatibility. All process steps developed here are realized in clean room environment.
Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)