Above Ic Micro-Power Generators for RF-Mems

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dc.creatorOukassi, S.
dc.creatorSalot, R.
dc.creatorBancel, S.
dc.creatorPereira-Ramos, J. -P.
dc.date2007-11-21
dc.date.accessioned2026-07-07T08:45:37Z
dc.date.available2026-07-07T08:45:37Z
dc.descriptionThis work presents recent advances in the development and the integration of an electrochemical (chemicalelectrical energy conversion) micro power generator used as a high voltage energy source for RF-MEMS powering. Autonomous MEMS require similarly miniaturized power sources. Up to day, solid state thin film batteries are realized with mechanical masks. This method doesn't allow dimensions below a few mm^2 active area, and besides the whole process flow is done under controlled atmosphere so as to ensure materials chemical stability (mainly lithiated materials). Within this context, Microelectronics micro-fabrication procedures (photolithography, Reactive Ion Etching...) are used to reach both miniaturisation (100x100 $μ$m^2 targeted unit cell active area) and Above IC technological compatibility. All process steps developed here are realized in clean room environment.
dc.descriptionSubmitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
dc.identifierhttps://arxiv.org/abs/0711.3296
dc.identifierhttp://arxiv.org/abs/0711.3296
dc.identifierDans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2006, Stresa, Lago Maggiore : Italie (2006)
dc.identifier.urihttp://salesiana.dossiersoluciones.com/handle/123456789/143018
dc.subjectOther Computer Science
dc.titleAbove Ic Micro-Power Generators for RF-Mems
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