Electron Optic Design of Arrayed E-Beam Microcolumns Based Systems for Wafer Defects Inspection

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In this paper is considered a matter of the system for wafer defect inspection (WDIS) practical realization. Such systems are on the agenda as the next generation and substitution for light optics and single $e$-beam based WDISs.
16 pages, 18 figures

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Optics, Instrumentation and Detectors

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http://salesiana.dossiersoluciones.com/handle/123456789/160320

Consulte el texto completo en el siguiente enlace:

https://arxiv.org/abs/0805.0495
 http://arxiv.org/abs/0805.0495

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arXiv